Nchacha kemịkalụ-mechanical (CMP) na-etinyekarị aka na imepụta ebe dị larịị site na mmeghachi omume kemịkal, ọkachasị na-arụ ọrụ na ụlọ ọrụ nrụpụta semiconductor.Lonnmeter, onye na-emepụta ihe ọhụrụ tụkwasịrị obi nke nwere ihe karịrị afọ 20 nke ọkachamara n'ịmụta ịta ahụhụ inline, na-enye ihe ọgbara ọhụrụ.mita njupụta na-abụghị nke nukliana ihe mmetụta viscosity iji gboo ihe ịma aka nke njikwa slurry.
Mkpa Ọdịmma Slurry na Ọkachamara Lonnmeter
The chemical mechanical polishing slurry bụ ọkpụkpụ azụ nke usoro CMP, na-ekpebi ịdị n'otu na ịdị mma nke elu. Njupụta njupụta ma ọ bụ viscosity na-ekwekọghị ekwekọ nwere ike ibute ntụpọ dị ka micro-scratches, mwepụ ihe na-ezighi ezi, ma ọ bụ mkpuchi mpe mpe akwa, na-emebi ogo wafer na ịbawanye ọnụ ahịa mmepụta. Lonnmeter, onye ndu zuru ụwa ọnụ na ngwọta nha ụlọ ọrụ, ọkachamara na nha slurry inline iji hụ na arụmọrụ slurry kacha mma. Site na ndekọ egwu egosipụtara nke na-ebuga ndị nwere ntụkwasị obi, ihe mmetụta dị elu, Lonnmeter esorola ndị na-emepụta semiconductor na-eduga iji kwalite njikwa na ịrụ ọrụ nke ọma. Mita njupụta slurry ha na-abụghị nke nuklia na ihe mmetụta viscosity na-enye data dị adị, na-eme mgbanwe ziri ezi iji nọgide na-enwe nkwụsi ike na-egbo mkpa siri ike nke nrụpụta semiconductor ọgbara ọhụrụ.
N'ime afọ iri abụọ nke ahụmịhe na nha ntinye uche inline, nke ụlọ ọrụ semiconductor kacha tụkwasịrị obi. A haziri sensọ Lonnmeter maka njikọta enweghị nkebi na mmezi efu, na-ebelata ụgwọ ọrụ.
Ọrụ nke Chemical Mechanical Polishing na nrụpụta Semiconductor
Chemical Mechanical polishing (CMP), nke a na-akpọkwa atụmatụ kemịkalụ-mechanical planarization, bụ isi nkuku nke nrụpụta semiconductor, na-enye aka ịmepụta mbara ala enweghị ntụpọ maka mmepụta mgbawa dị elu. Site na ijikọ kemịkalụ etching na abrasion n'ibu, usoro CMP na-eme ka a mata nkenke achọrọ maka sekit agbakwunyere ọtụtụ ihe na ọnụ n'okpuru 10nm. Ihe mejupụtara kemịkalụ n'ibu polishing slurry, nke mmiri mejupụtara, kemịkalụ reagents na ihe abrasive, na-emekọrịta ihe na mpe mpe akwa na wafer iji wepụ ihe n'otu n'otu. Ka atụmatụ semiconductor na-etolite, usoro CMP na-eche ihu mgbagwoju anya na-abawanye, na-achọ njikwa siri ike na akụrụngwa slurry iji gbochie ntụpọ ma nweta ọmarịcha, wafer a na-egbu maramara nke Semiconductor Foundries na ndị na-eweta ihe na-achọ.
Usoro a dị mkpa maka iwepụta ibe 5nm na 3nm nwere obere ntụpọ, nke na-eme ka ebe dị larịị maka ntinye ziri ezi nke ọkwa na-esote. Ọbụlagodi obere slurry na-ekwekọghị ekwekọ nwere ike ibute ịrụ ọrụ dị oke ọnụ ma ọ bụ weta mfu.
Ihe ịma aka dị na nlekota Njirimara Slurry
Idokwa njupụta slurry na viscosity na-agbanwe agbanwe na usoro nchacha kemịkalụ nwere nnukwu nsogbu. Ngwongwo slurry nwere ike ịdịgasị iche n'ihi ihe ndị dị ka mbufe njem, ntughari na mmiri ma ọ bụ hydrogen peroxide, ngwakọta ezughị oke, ma ọ bụ mmebi kemịkalụ. Dịka ọmụmaatụ, idozi urughuru na tote slurry nwere ike ime ka njupụta dị elu na ala, na-eduga na nchacha na-abụghị otu. Ụzọ nleba anya n'ọdịnala dị ka pH, oxidation-reduction potential (ORP), ma ọ bụ conductivity anaghị abụkarị nke zuru oke, ebe ọ bụ na ha anaghị achọpụta mgbanwe dị nro na nhazi slurry. Mgbochi ndị a nwere ike bute ntụpọ, mbelata ọnụego mwepụ, yana ọnụ ahịa oriri na-abawanye, na-etinye nnukwu ihe egwu maka ndị nrụpụta akụrụngwa semiconductor na ndị na-eweta ọrụ CMP. Mgbanwe nhazi n'oge njikwa na nkesa na-emetụta arụmọrụ. Ọnụ ụzọ okpuru-10nm chọrọ njikwa siri ike maka ịdị ọcha slurry na ngwakọta ziri ezi. pH na ORP na-egosi obere mgbanwe, ebe conductivity dịgasị iche iche na slurry ịka nká. Ngwongwo slurry na-ekwekọghị ekwekọ nwere ike ịbawanye ọnụego ntụpọ ruo 20%, kwa ọmụmụ ụlọ ọrụ.
Ihe mmetụta ntanetị nke Lonnmeter maka nleba anya oge
Lonnmeter na-elebara ihe ịma aka ndị a anya site na mita njupụta njupụta ya na-abụghị nke nuklia naihe mmetụta viscosity, gụnyere viscosity mita inline maka in-line viscosity nha na ultrasonic njupụta mita maka imekotaotuugbo slurry njupụta na nlekota viscosity. Emebere sensọ ndị a maka ntinye enweghị nkebi n'ime usoro CMP, na-egosipụta njikọ ọkọlọtọ ụlọ ọrụ. Ngwọta Lonnmeter na-enye ntụkwasị obi ogologo oge yana mmezi dị ala maka owuwu ya siri ike. Data oge na-enyere ndị na-arụ ọrụ aka ịhazi ngwakọta slurry nke ọma, gbochie ntụpọ, na ịkwalite arụmọrụ polishing, na-eme ka ngwá ọrụ ndị a dị mkpa maka ndị na-ebunye ihe nyocha na nyocha na ndị na-ebu ihe CMP.
Uru nke nlekota oru na-aga n'ihu maka nkwalite CMP
Nleba anya na-aga n'ihu na sensọ inline Lonnmeter na-agbanwe usoro nchacha kemịkalụ site n'iwepụta nghọta nwere ike ime yana nnukwu ego nchekwa. Ntụle njupụta slurry dị adị na nleba anya viscosity na-ebelata ntụpọ dị ka ncha ma ọ bụ nchacha ihe ruru 20%, dịka akara ụlọ ọrụ siri dị. Ntinye na sistemu PLC na-enyere aka dosing akpaghị aka na njikwa nhazi, na-ahụ na akụrụngwa slurry nọrọ n'ime oke kacha mma. Nke a na-eduga na mbelata 15-25% n'ụgwọ oriri, belata oge nkwụsịtụ, yana nkwalite otu wafer. Maka ntọala Semiconductor na ndị na-enye ọrụ CMP, uru ndị a na-atụgharị gaa na nrụpụta nrụpụta, oke uru dị elu, yana nrube isi n'ụkpụrụ dịka ISO 6976.
Ajụjụ a na-ajụkarị gbasara Nlebanya Slurry na CMP
Kedu ihe kpatara nha njupụta slurry dị mkpa maka CMP?
Slurry njupụta nha ana achi achi na otu urughuru nkesa na ngwakọta agbanwe agbanwe, na-egbochi ntụpọ na optimizing mwepụ ọnụego na chemical n'ibu polishing usoro. Ọ na-akwado mmepụta wafer dị elu na nnabata na ụkpụrụ ụlọ ọrụ.
Kedu ka nlekota viscosity si eme ka arụmọrụ CMP dịkwuo elu?
Nleba anya viscosity na-ejigide slurry slurry na-aga n'ihu, na-egbochi okwu ndị dị ka mkpuchi mkpuchi ma ọ bụ ihicha nke na-enweghị isi. Sensọ inline nke Lonnmeter na-enye data ezigbo oge iji bulie usoro CMP wee kwalite mkpụrụ wafer.
Kedu ihe na-eme mita njupụta njupụta nke Lonnmeter na-abụghị nke nuklia pụrụ iche?
Mita njupụta slurry nke Lonnmeter na-abụghị nke nuklia na-enye njupụta n'otu oge na nha viscosity na oke ziri ezi yana mmezi efu. Nhazi ha siri ike na-eme ka ntụkwasị obi na-achọ gburugburu usoro CMP.
Ntụle njupụta slurry nke oge na nleba anya viscosity dị oke mkpa maka ịkwalite usoro nchacha kemịkalụ n'ichepụta semiconductor. Miter density slurry na-abụghị nke nuklia na ihe mmetụta viscosity nke Lonnmeter na-enye ndị na-emepụta ihe eji arụ ọrụ Semiconductor, ndị na-eweta ihe oriri CMP na Semiconductor Foundries nwere ngwaọrụ iji merie ihe ịma aka njikwa slurry, belata ntụpọ, yana ọnụ ala dị ala. Site n'iwepụta data ziri ezi, ezigbo oge, azịza ndị a na-eme ka arụmọrụ usoro dị mma, hụ na nrubeisi, na ịkpata uru na ahịa CMP asọmpi. Gaa letaEbe nrụọrụ weebụ Lonnmeterma ọ bụ kpọtụrụ ndị otu ha taa ka ha chọpụta ka Lonnmeter nwere ike isi gbanwee ọrụ ịcha akwa kemịkal gị.
Oge nzipu: Jul-22-2025
